Controllable Formation and Optical Characterization of Silicon Nanocone-Forest Using SF6/C4F8 in Cyc
- 所属机构名称:北京大学
- 会议名称:8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2013)
- 时间:2013
- 成果类型:会议
- 相关项目:适用于物联网的电磁和压电复合式低频振动能量采集器