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Controllable Formation and Optical Characterization of Silicon Nanocone-Forest Using SF6/C4F8 in Cyc
  • 所属机构名称：北京大学
  • 会议名称：8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS2013)
  • 时间：2013.4.7
  • 成果类型：会议
  • 相关项目：适用于物联网的电磁和压电复合式低频振动能量采集器
同会议论文项目
适用于物联网的电磁和压电复合式低频振动能量采集器
期刊论文 66 会议论文 65 获奖 4 著作 4
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Controllable Formation and Optical Characterization of Silicon Nanocone-Forest Using SF6/C4F8 in Cyc
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