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Ion energy distributions at a grounded electrode for dual frequency capacitively coupled plasmas
  • 所属机构名称：大连理工大学
  • 会议名称：9th APCPST
  • 成果类型：会议
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： Zhi-Cheng Li|Xiang Xu|You-Nian Wang|Wen-Qi Lu|Xiao-Song Li|
同会议论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
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Two-dimensional fluid simulation of VHF capacitively coupled plasmas for silane discharges
Two-Dimensional and Implicit PIC/MC Simulations for Capacitively Coupled Plasmas
Two-dimensional hybrid simulation of capacitively coupled plasmas with two rf sources
Two-dimensional hybrid simulation of capacitively coupled plasmas with two rf sources
Two-dimensional fluid simulation of VHF capacitively coupled plasmas for silane discharges
Ion energy distributions at a grounded electrode for dual frequency capacitively coupled plasmas
Two-Dimensional and Implicit PIC/MC Simulations for Capacitively Coupled Plasmas