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中文摘要：
针对双频电容耦合、电感/电容耦合以及微波ECR/电容耦合等放电方式，研究低气压等离子体的产生机理及约束方法；分别采用探针、光谱、质谱等实验诊断手段和计算模拟方法研究不同电源的频率及功率的匹配方式对等离子体参数（等离子体密度、电子温度等）及化学活性粒子种类，以及入射到基片表面上离子能量和角度分布的影响，其中重点研究低频电源对等离子体状态参数及鞘层特性的调制行为；建立这种放电等离子体与基片表面相互作用的物理模型，研究频率及功率的匹配效应对刻蚀率、刻蚀剖面及介质薄膜特性的影响，为双频等离子体刻蚀和薄膜制备工艺的参数优化提供必要的科学依据。
结论摘要：
英文主题词Low-pressure; multi-frequency discharges; frequency matching; plasma characteristics;plasma etching
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期刊论文
E?ect of Low-frequency Power on F, CF2 Relative Density and F/CF2 Ratio in Fluorocarbon Dual-Frequen
Effect of C:F Deposition on Etching of SiCOH Low-k Films in CHF3 60 MHz/2 MHz Dual-Frequency Capacit
Effect of high-frequency on etching of SiCOH films in CHF3 dual-frequency capacitively coupled plasm
Formation of SiC Nanostruture Using Hexamethyldisiloxane During Plasma-Assisted Hot-Filament Chemica
Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/C
Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled ar
Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric ge
Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen p
Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacit
Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capac
One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Dischar
Spectroscopic study on rotational and vibrational temperature of N2 and N2 + in dual-frequency capac
Parallelization and optimization of electrostatic Particle-in-Cell/Monte-Carlo Coupled codes as appl
Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma usi
Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency c
The influence of Exciting Frequency on N2 and N+2 Vibrational Temperature of Nitrogen Capacitively C
Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency ca
Effect of substrate facets on homoepitaxial growth of diamonds during plasma-assisted hot filament c
Two-dimensional fluid model of pulse sheath in plasma immersion ion implantation with dielectric sub
Coupling effect of electron cyclotron resonance hydrogen plasma and dc biasing in fabricating diamon
Response to “Comment on ‘Influence of exciting frequency on gas and ion rotational temperatures of n
The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by su
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