Study on the uniformity of micro electroforming mold insert used in micro fluidic-chip fabrication
- 所属机构名称:大连理工大学
- 会议名称:MNC2007-International Conference Integration and Commercialization of Micro and Nanosystems
- 成果类型:会议
- 会场:Sanya
- 相关项目:微制造中有机高聚物超声时效理论与方法研究