The Thermal Analysis and Simulation of On-chip Temperature Control Technology in the Micro-gyroscope
- 所属机构名称:东南大学
- 会议名称:4th international conference on machinery ,materials science and engineering applications(MMSE2014)
- 时间:2014.6.28
- 成果类型:会议
- 相关项目:基于芯片级温控的硅微陀螺仪温度误差校正理论与试验研究