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Performance optimization for TANOS by using pre-treatment of plasma oxygenic ions
  • 所属机构名称：中国科学院微电子研究所
  • 会议名称：2011 11th Annual Non-Volatile Memory Technology Symposium, NVMTS 2011
  • 成果类型：会议
  • 相关项目：纳米加工与新型半导体器件研究
作者： Xu, Zhongguang|Huo, Zongliang|Zhu, Chenxin|Liu, Jing|Liu, Ming|
同会议论文项目
纳米加工与新型半导体器件研究
期刊论文 101 会议论文 13 获奖 2 专利 121
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