The effects of growth temperature of the pulse atomic layer epitaxy AlN films grown on sapphire by M
- 所属机构名称:华中科技大学
- 会议名称:Photonics and Optolectronics Meetings (POEM) 2011: Optoelectronic Devices and Integration
- 时间:2012
- 成果类型:会议
- 相关项目:非极性面ZnO/ZnCdO量子阱结构LED外延材料生长与器件制备研究