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Nondestructive implantation dose determination of annealed semiconductor by infrared ellipsometry
  • 所属机构名称：中国科学院光电技术研究所
  • 会议名称：15th International Conference on Photoacoustic and Photothermal Phenomena (ICPPP15)
  • 成果类型：会议
  • 会场：Leuven, BELGIUM
  • 相关项目：半导体材料特性的光学检测技术研究
作者： Xianming Liu|Lifeng Gao|Weidong Gao|Bincheng Li|
同会议论文项目
半导体材料特性的光学检测技术研究
期刊论文 11 会议论文 8 专利 3
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