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Depth control method of AFM-based nanomachining with diamond tip in deflection mode
  • 所属机构名称：哈尔滨工业大学
  • 会议名称：e-Engineering and Digital Enterprise Technology, e-ENGDET 2007
  • 成果类型：会议
  • 相关项目：基于AFM加工技术的自组装有序纳米微结构形成机理研究
作者： Zhao, Z.Z.|Sun, T.|Yan, Y.D.|Dong, S.|Hu, Z.J.|
同会议论文项目
基于AFM加工技术的自组装有序纳米微结构形成机理研究
期刊论文 12 会议论文 7 获奖 2
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