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Deformation Analysis of MEMS using High Density Grating Measurement Techniques
所属机构名称:天津大学
会议名称:第三届二十一世纪的实验力学学科发展——海峡两岸实验力学研讨会
成果类型:会议
会场:中国内蒙古呼和浩特
相关项目:微纳尺度实验力学中的传感、测量、识别新方法研究
作者:
谢惠民|
同会议论文项目
微纳尺度实验力学中的传感、测量、识别新方法研究
期刊论文 140
会议论文 38
获奖 2
同项目会议论文
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