中文摘要：

为了满足脉冲式电子顺磁共振谱仪的需要,设计并制作了连续波谐振腔和脉冲谐振腔.连续波谐振腔采用矩形谐振腔的设计,而脉冲谐振腔采用了微型平面腔的设计.在设计阶段,使用Ansoft-HFSS三维电磁仿真软件对2种谐振腔进行模拟计算.微型平面腔的加工采用了微纳加工技术.制作完成的谐振腔的参数指标由网络分析仪测定.实验测得2种谐振腔的参数指标符合理论模拟值,并满足脉冲式电子顺磁共振谱仪的要求.

英文摘要：

The continuous wave and pulse resonant cavities were designed and manufactured for the pulsed electron paramagnetic resonance（EPR） spectrometer.The resonant cavity used for the continuous wave EPR was a rectangular resonator,and the pulse resonant cavity adopted the structure of planar microresonator.The software of 3D electromagnetic simulation,Ansoft-HFSS,were used for simulation.The parameters of the designed resonators were evaluated with the network analyzer.The experimental data were found to be consistent with those of theoretical simulation.