中文摘要：

提出和发展了一种激光光路跟踪型原子力显微镜（AFM）技术及系统。研制了新型AFM探头,设计了与XY扫描器联动的跟踪透镜及扫描跟踪光路,实现激光束对微探针（微悬臂）的XY扫描的实时跟踪;研究设计了独特的反馈跟踪光路,既可实现微悬臂偏转量的精确检测,又可巧妙地消除因微探针的Z向反馈运动造成的干扰噪声。利用研发的AFM系统对多孔氧化铝纳米孔等具有不同横向与纵向结构尺寸的微纳米样品进行了扫描成像,得到了理想的实验结果,表明研发的系统具有优良的XY扫描跟踪特性和Z向反馈跟踪性能。本文研发的AFM系统原理新颖、方法巧妙、扫描成像性能好和分辨率高,克服了常规样品扫描型AFM的局限性,能够以微探针扫描的方式实现不同大小、不同重量的样品的AFM扫描成像,可望在微纳米技术领域获得广泛应用。

英文摘要：

This paper proposes a new type of laser beam tracking atomic force microscope （AFM）. A spe- cially designed AFM probe is developed. It consists of a scan tracking path for tracking XY scanning by a tracking lens moving with XY scanner,which enables the laser beam to track XY scanning of micro- probe （cantilever）. Meanwhile, a specific feedback tracking path is employed to realize accurate detection of cantilever deflection,and eliminate the noise caused by Z feedback movement of microprobe. Experi- ments are carried out by this AFM using samples with different structures,including nano-pores of por- ous alumina, nanoimprint structure on polycarbonate film and large-scale structures on a sapphire glass substrate. The results show that the AFM system has not only good XY scanning tracking feature but also excellent Z feedback tracking performance. With scanning tracking path and feedback tracking path, the AFM system is of innovative principle, ingenious method, excellent imaging performance and high resolution. By utilizing tip-scanning mode, this AFM system overcomes the limitations of conventional sample-scanning AFMs,and is capable of achieving image scanning and acquisition for samples with dif- ferent sizes and different weights. These outstanding characteristics enable this AFM technique to be widely applied in the fields of micro/nano-technology.