中文摘要：

本文提出和发展了一种多扫描方式的新型原子力显微镜（AFM）技术及系统。该系统拥有三个不同的扫描器,以相互组合的方式实现三种不同的扫描方式,由管状压电陶瓷驱动的柔性结构扫描器,采用样品扫描方式,对于小尺寸样品能够提供高分辨率的快速扫描;由叠层式压电陶瓷驱动的扫描器,采用探针扫描方式,提供各类样品的大范围扫描;由步进电机驱动的扫描器,采用样品扫描方式,能够实现大尺寸样品的大范围扫描。三种方式的单幅图像扫描范围可分别达到4μm×4μm、20μm×20μm、40μm×40μm。实验结果表明,借助于上述多扫描方式及独特的结构设计,该AFM不仅具有分辨率高、扫描速度快、重复性好等优化性能,而且能同时实现各类尺寸样品的各种扫描范围的微纳米成像,具有更好的实用性,可望在微纳米技术领域获得广泛应用。

英文摘要：

A multi scan mode Atomic Force Microscope （AFM） with improved properties and high applicability is proposed. The AFM system consists of three different scanners and provides at least three scan modes. The first scanner made of tube piezos and flexure structures uses the sample scan mode to realize high speed and high resolution imaging for small sized sample. The second scanner made of stack piezos takes the tip scan mode for small and/or large samples. The third scanner driven by step motors provides the sample scan mode to realize wide range imaging for large sized samples. Their scan ranges can reach 4 ~trn~4 tam, 20 pmx20 pan and 40 ~tmx40 ~m, respectively. Experiments show that, with multi scan modes and special structures, the AFM is of improved properties such as high resolution, quick scan speed, and high repeatability. Meanwhile, it is capable of realizing micro/nano imaging with different scan range for small and/or large sized samples. With these improved properties and high applicability, the AFM can be widely applied in the fields of micro/nano-technology.