中文摘要：

考虑固有点缺陷形成E’色心的情况，建立了E’色心形成的动力学模型，得到了高纯硅低能粒子辐照E’色心浓度与辐照剂量的关系式．结果表明，在低辐照剂量下，E’色心浓度随剂量的变化呈线性增长；随着辐照剂量的增加，E’色心浓度随剂量的变化呈饱和趋势．如果进一步考虑E’色心和其他物质反应形成新的稳定结构，E’色心浓度随剂量的变化呈双指数关系，E’色心浓度随剂量的变化不再趋于饱和状态，而是偏离饱和状态．理论结果和实验结果很好地符合，说明建立的模型是有效的．

英文摘要：

In this paper, a kinetic model for the radiation-induced production of the intrinsic point defect E＇ center is proposed. The results show that E＇ center concentration increases linearly with dose in low dose regions, and it tends to saturate in high dose regions. Further, it is found that E＇ center is dual exponential function of dose, and the saturate state collapses if the second reaction is considered. The theoretical result is in good agreement with the experiment.