中文摘要：

将所设计的纳米颗粒胶体射流加工系统与计算机控制技术结合，实现了计算机控制纳米颗粒胶体射流加工，可将其应用于小曲率半径非球面和自由曲面元件的超光滑表面加工。本试验对一非球曲面高纯石英玻璃元件进行纳米颗粒胶体射流超光滑表面加工，用表面轮廓仪测量了纳米颗粒胶体射流加工前后该高纯石英玻璃元件的表面轮廓曲线。实验结果表明：计算机控制纳米颗粒胶体射流加工，实现了可控的彬纳米材料去除，该非球曲面元件轴向最大去除量为900nm。原子力显微镜检测结果表明：该元件轮廓截面曲线上的表面粗糙度由Ra2．860nm降低到Ra．460nm。采用纳米颗粒胶体射流技术对小曲率曲面及自由曲面进行超光滑表面加工，是一种确定性超光滑表面的加工方法。

英文摘要：

A nanoparticle colloid jet machining （short for NCJM ） system was designed combined with computer control technology, that can be used for ultra-smooth surface machining of small curvature radius aspherical components and free surface components. Ultra-smooth surface machining experiments were done upon a high-purity quartz glass substrate with an aspheric surface. Surface profilometer was utilized to measure the surface profiles of workpiece before and after being polished by NCJM. The results indicated that the NCJM can realize material removal of nanometer level by computer control. The maximum material removal of 900 nm was achieved at axial direction of aspheric workpiece. Atomic force microscopy results showed that the surface roughness of the component＇s outline cross-section curve was reduced from Ra 2. 860 nm to Ra 0. 460 nm. NCJM is suitable for polishing free surface components and can realize controllable material removal.