中文摘要：

综合考虑了工件表面原子的微观状态，利用纳米颗粒特殊的高比表面能和高吸附特性，提出了一种可实现工件表面原子级去除的纳米胶体射流抛光方法。利用碱性胶体中纳米颗粒与工件的表面反应，设计了可实现超精密表面加工的纳米胶体射流抛光系统，并利用该系统对K9玻璃进行抛光。试验结果表明，纳米胶体射流抛光可实现超精密光学表面的抛光，抛光后表面粗糙度Ra小于1nm。

英文摘要：

Studied the micro structure of work surface atoms, the high surface energy and intense adsorption of SiO2 nanoparticle. For producing ultra-precision surface, a nanopartiele colloid jet machining system was designed and manufactured where the reversible polymerize and decompose reaction was utilized to remove surface atoms. We employed the system to polish a K9 glass sample, some recent experiments prove that it is possible to fabricate ultra-precision in nanoparticle colloid jet machining. The microroughness of the work surface processed by nanoparticle colloid jet machining is under 1nm Ra.