中文摘要：

提出了一种层叠绕组式五自由度磁悬浮永磁直流平面电机的构想,针对该磁悬浮平面电机中的磁悬浮系统进行了控制系统设计。在对悬浮系统三维有限元分析的基础上利用参数辨识法构建了磁悬浮系统非线性模型;并利用微分几何方法,对磁悬浮模型进行完全精确反馈线性化,设计了PID控制器,并进行了样机控制实验。磁悬浮永磁直流平面电机悬浮高度的控制仿真和实验结果吻合度良好,系统稳态误差在1μm以内并具有优良的跟踪性能。

英文摘要：

This paper proposes overlapped winding five-freedom-degree permanent magnet Direct-Current （PMDC） maglev planar motor and designs the control system in allusion to the maglev system in the planar motor. Based on 3D finite element analysis of the maglev system, this paper utilizes parameter identification method to construct nonlinear model of the maglev system. Besides, differential geometry method is used for complete accurate feedback linearization of the maglev model. PID controller is designed. Prototype control experiment is conducted. Simulation and experiment results of suspension height of PMDC maglev planar motor coincide well. The steady-state error of the system is less than 1 μm and the tracking performance is excellent.