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Fabrication of SU-8 moulds on glass substrates by using a common thin negative photoresist as an adh
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：-
  • 相关项目：基于紫外光刻的聚合物二维纳米模具及其复制成形理论与方法研究
作者： Liu Junshan|Song Dongfang|Zong Guoge|Yin Penghe|Zhang Xiaolei|Xu Zheng|Du Liqun|Liu Chong|Wang Liding|
同期刊论文项目
基于紫外光刻的聚合物二维纳米模具及其复制成形理论与方法研究
期刊论文 14 专利 4 著作 1
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