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Fabrication of planar nanofluidic channels in thermoplastic polymers by O2 plasma etching
  • ISSN号：1750-0443
  • 期刊名称：Micro & Nano Letters
  • 时间：2012
  • 页码：159-162
  • 相关项目：基于紫外光刻的聚合物二维纳米模具及其复制成形理论与方法研究
作者： Liu Junshan|Qiao Hongchao|Xu Zheng|Liu Chong|Wang Junyao|Du Liqun|Zhang Xi|Wang Liding|
同期刊论文项目
基于紫外光刻的聚合物二维纳米模具及其复制成形理论与方法研究
期刊论文 14 专利 4 著作 1
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