中文摘要：

用等离子体浸没离子注入与沉积（PIIID）复合改性技术在AISI52100轴承钢基体表面合成了高硬耐磨的TiN薄膜。膜层的相组成及其表面形貌分别用x射线衍射（XRD）和原子力显微镜（AFM）表征。合成薄膜前后试样的力学性能经纳米压痕和划痕实验评价。XRD结果表明，膜层中主要存在TiN相，择优取向（200），同时含有少量TiO2和钛氮氧的化合物。AFM形貌显示出试样表面TiN呈定向排列，膜层均匀完整，结构致密。纳米压痕测试结果表明，膜层具有较高的纳米硬度和弹性模量，最大值分别达到22．5和330GPa，较基体分别增长104．5％和50％。根据纳米划痕形貌和划痕深度随划痕位置的变化关系分析出，薄膜在纳米划擦过程中先后经历了弹性变形，弹塑性变形，加载开裂或卸载剥落三个阶段。划擦剥落抗力达到80mN，表明TiN薄膜具有很好的弹性恢复能力和较强的疲劳剥落抗力。

英文摘要：

The TiN films were fabricated by plasma immersion ion implantation and deposition （PIIID） on AISI52100 bearing steel substrates. The microstructures and mechanical properties of the TiN films were characterized with X-ray diffraction and atomic force microscopy and nano-indentation. The results show that the TiN films significantly improve the mechanical properties of the steel surface. For example, the highest nano-hardness and elastic modulus of the fairly smooth and compact TiN films are 22.5 GPa and 330 GPa, respectively, 104.5% and 50% higher than those of the substrates.The scratching proceeds from elastic deformation, to plastic deformation, and to load-induced cracking or delaminating due to unloading. The critical cracking resistance was found to be about 80 mN. Besides, the PIIID TiN film shows a fairly stronger elastic recovery and a higher fatigue delaminating resistance.