在电影体积的压电的分层的结构的波浪繁殖声学的共鸣器(FBAR ) 被学习。分散关系的精确结果为 electroded 和 unelectroded 用建议有弹性的电极模型被计算分层的盘子。在当前的有弹性的电极模型和简化惯性的电极之间的计算截止频率的差别当模特儿(经常在石英共鸣器分析使用) 详细被说明,它证明一个有弹性的电极模型确实为 FBAR 的精确分析被需要。这些结果能被用作一个精确标准校准 2-D 为 FBAR 的真实有限尺寸的结构的理论模型。
Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR/ is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR.