中文摘要：

利用电子束蒸发在硅衬底上制备Al膜,并制备硅基阳极氧化铝（AAO）模板;利用X射线衍射和扫描电子显微镜对模板的结构和形貌进行了表征;利用计算机对阳极氧化电流的实时观测监控了硅基AAO模板的自组装过程.优化了制备孔洞规则的高质量硅基阳极氧化铝模板的条件,该模板对进一步研究硅基AAO模板多铁功能纳米管线及相应的器件奠定了基础.

英文摘要：

Al films were deposited on silicon substrate by electron beam evaporation method,and thus silicon-based anodic aluminum oxide template（AAO） were prepared in the further processing.The structure and surface morphology of AAO templates were characterized by XRD and SEM.Self-organiziation process of AAO templates were supervised through observing the anodic oxidation current changes with time by computer.Finally,high quality silicon-based AAO templates were prepared under the optimized conditions.These results can be foundations for the preparation of multiferrous nano-wires and concerned devices on silicon-based AAO templates.