采用磁控溅射法,使用WS2/MoS2/C复合靶材,通过与乙炔气体反应溅射,制备WS2/MoS2/C复合薄膜,利用X射线衍射对薄膜的成分结构进行分析,采用MFT-4000材料表面性能试验仪在室温大气环境(相对湿度60%)下评价薄膜的摩擦磨损性能,使用Axio CSM700共聚焦显微镜观察WS2/MoS2/C复合薄膜磨损表面磨痕形貌,结果表明,WS2/MoS2/C复合薄膜结构致密,在潮湿大气中抗磨损性能比MoS2磁控溅射薄膜有显著提高,在30min往复摩擦后复合薄膜未发生磨屑脱落。
WS2/MoS2/C composite lubricating film was prepared with C2H2 in working atmosphere by magnetron reaction-sputtering method energy dispersive X-ray detector were used to analyze and using a composite target. X-ray diffraction and the composition and microstructure of the films. The friction behavior was performed on a MFT-4000 material surface properties tester at room temperature in air (RH = 60% ). Axio CSM 700 high-resolution confocal microscope was used to analyze the worn scratches on the composites surface. The composite film had a compact microstructure. As compared with pure MoS2 film at humid atmospheric conditions, the WS2/MoS2/C composite film exhibited better antiwear properties, there were no abrasive dust shedding from the composite films after reciprocate friction for 30 min.