中文摘要：

研究固态振梁型角速率传感器加工误差的类型和对性能的影响程度。从动力学特性和误差产生的机理入手,针对因加工水平限制传感器而产生的输出误差进行理论推导,并结合100mm合金振梁完成数值计算,得出正交误差是影响陀螺输出性能的主要因素误差源,而驱动轴同敏感轴的垂直度是影响正交误差的主要因素;经计算质心偏移误差随着角加速度值变化而变化,在角加速度较小的情况下可以忽略;寄生哥氏力误差对陀螺性能的影响最小。对驱动轴同敏感轴垂直方向偏差角为0.6260°时的正交误差进行仿真,结果同理论等效值（输入值为2π/°s时的输出）的误差为4.88%,仿真结果同理论推导结果吻合。证明改进加工工艺及降低驱动轴同敏感轴的垂直度对改进固态振梁角速率传感器性能的有效性。

英文摘要：

Types of machining error of vibration beam rate sensor and their influence degree on performance are studied.This paper starts with the dynamics analysis and the mechanism of error generation.The error of gyro＇s output signal caused by the technology limit is deduced theoretically,and numerical calculations are carried out for 100 mm alloyed vibration beam.Analysis results show that quadrature error is the main source error of the gyro performance,and the verticality between drive axis and sensing axis is the primary factor affecting quadrature error;the error caused by mass center deviation of vibration beam changes with angular acceleration,which can be ignored under the condition that the angular acceleration is small;the influence of parasitic coriolis error on performance is minimal,and can be neglected.Finally,the quadrature error is simulated when the deviation angle between drive axis and sensing axis in the vertical direction is 0.626 0°,which shows that the error between quadrature error and theoretical equivalent value（the output signal when the gyroscope＇s rotation velocity is 2π°/s）is 4.88%.The simulation results agree with the theoretical deduction results,thus proving the effectiveness of improving the performance of vibration beam rate sensor by improving the manufacturing process and reducing the verticality between drive axis and sensing axis.