中文摘要：

研究出飞秒激光加工法布里-珀罗（F-P）腔的方法,并且将F-P腔和单模光纤焊接起来形成微型非本征光纤F-P干涉（EFPI）应变传感器。实验分析了激光能量与腐蚀对F-P腔深度的关系,设计传感器的加工步骤,对光纤法布里-珀罗传感器的应变特点进行讨论。实验显示,这种构造的干涉传感器加工流程不复杂,对于微小形变具备较好的灵敏度与可重复性,其应变灵敏度为0.00466nm/uε。所以,这种新型的EFPI应变传感器具有良好的稳定性和可重复性,在改变生产工艺和在复杂工况环境中的使用具有较好的工程应用前景。

英文摘要：

A method is put forward to fabricate F-P cavity by using femtosecond laser.Extrinsic Fabry-Perot interferometer （EFPI） sensor is formed to put single mode fiber （SMF） and F-P cavity into fusion.The manufacturing process of the sensor is simplified,and the use range is enlarged.The relation among the laser energy,the corrosion and the F-P cavity depth is simulated.The processing step is designed and the strain characteristics of optical fiber sensor is studied.The results show that the structure of the interferometric sensor has simple process,high sensitivity and repeatability for small deformation,the strain sensitivity of 0.00466 nm/με.Therefore,this new type of EFPI strain sensor has good structural stability and repeatability,and has a good engineering application prospect in changing the production process and the use of the complex working conditio.