中文摘要：

静电悬浮微陀螺需要一套支承系统将高速旋转的环形转子稳定地悬浮在电极环腔中心。在推导被控对象静电力模型的基础上，构建了静电悬浮系统的5轴闭环控制模型，利用该模型分析了悬浮微陀螺的加速度／角速率测量原理，设计了基于数字控制的支承线路。依据敏感表头的结构参数确定了支承线路的电参数，结合悬浮系统性能指标，通过反复仿真来设计控制器参数，分析了悬浮系统的闭环动态特性、刚度特性和抗过载能力。对数字控制器的扫频结果表明：考虑采样频率引起的相位滞后，在剪切频率附近相位误差不超过15°。

英文摘要：

An electrostatic levitation system for micro-gyroscope has been adopted to suspend the rotating ring-shaped rotor in electrode chamber center. According to the devised electrostatic force model, five-axis close loop control model for electrostatic levitation system has been built up. The working principles of the levitated gyroscope for measuring acceleration and angular rate have been analyzed, and the digital controlled levitation circuits have been designed. The circuit electric parameters have been determined based on the sensor structure parameter. According to performance indexes of the levitated control system, the controller parameters have been determined by simulation. The dynamic response and suspension rigidities of the close loop levitated system have been analyzed, and the overload capacity has also been evaluated. The frequency sweeping experiments for digital controllers demonstrate that the lag phase caused by digital sampling is not less than 15° at the gain crossover frequency.