中文摘要：

设计了一种转子采用五自由度静电悬浮的微机械陀螺。微陀螺基于玻璃-硅-玻璃键合的三明治结构、环形转子、体硅工艺、电容式位移检测方案;采用公共电极施加高频激励信号,基于隔离网络和频分复用的方法实现检测电极与加力电极的复用以简化陀螺结构;通过有源静电悬浮系统约束环形转子沿五自由度的运动,并提供足够的支承刚度;转子的转速控制基于三相可变电容式电机驱动方式,借助于检测转子与定子旋转电极的电容变化获得转子速度以实现转速闭环控制。目前已加工出基于深反应离子刻蚀工艺的微结构,采用基于DSP的数字控制器实现了环形转子的五自由度稳定悬浮。

英文摘要：

A micromachined gyroscope was designed with a rotor electrostatically levitated in five degrees of freedom （DOFs）. The proposed device is based on glass-silicon-glass triple stack structure, annular rotor, bulk micromachining, and capacitive position sensing. A capacitive sensor interface, which uses common electrodes for high-frequency excitation and multiplexed electrodes for sensing and actuation, was introduced in order to simplify the microstructure of the gyroscope. To maintain stable levitation, an active levitation system was utilized to control the motion of the rotor in five DOFs, three translations and two out-of-plane rotations with adequate suspension stiffness. The rotor was rotated based on the principle of three-phase variable capacitance motor, and operated at closed-loop speed control by measuring the capacitances between the rotor and associated driving electrodes. A prototype structure was designed and fabricated by deep reactive ion etching process. Multi-axis closed-loop control was implemented using a high-speed DSP controller to achieve stable levitation of the rotor.