中文摘要：

性能良好的驱动电源是实现压电陶瓷驱动器高精度定位的关键。基于集成高压运算放大器的直流放大式压电陶瓷驱动电源,具有集成度高,体积小,可靠性好等突出优点;但运放的发热问题,是影响其应用和发展的一个重要因素。对一种基于PA93功率运算放大器的压电陶瓷驱动电源,进行了实验性的研究,采用半导体制冷片和ALT-PT100贴片式温度传感器构成温度闭环控制系统,通过改变制冷片外加电源的极性和电压大小,将集成高压运算放大器的工作温度控制在一定范围内,可有效降低压电陶瓷驱动电源输出电压的纹波到7.8mV,提高了电源输出电压的精度。找到了温度对电源输出电压精度影响的规律,为如何进一步提高压电陶瓷驱动电源输出电压的精度,实现压电陶瓷驱动器高精度的定位控制,提供了科学的方法和依据。

英文摘要：

Good performance of driving power supply is the key to achieve high-precision positioning of the piezoelectric ceramic.The PZT power supply based on the integrated high-voltage operational amplifier demonstrates superior characteristics of high integration,miniature size,high reliability etc.But the heat problem of operational amplifier effects its application and development badly.Through the research experiment of a PZT power supply based on PA93 power operational amplifier,the temperature control system has been constructed with semiconductor refrigeration piece and temperature sensor of the ALT-PT100.The temperature of amplifier can be controlled through changing the refrigeration piece power supply＇s polarity and voltage size.This may reduce the output voltage ripple to 7.8 mV effectively and enhance the precision of output voltage.The regularity of the effect of the temperature on the temperature on the power output accuracy has been found.These researches provide scientific ways for improving the output accuracy of PZT power supply and realizing the high precision positioning control of PZT drive.