中文摘要：

基于氧含量对纳米复合结构CrAlSiN 涂层性能的影响,采用电弧离子镀技术在3.0Pa 气压下通入不同比例的氧氮气流沉积CrAlSiON 涂层,并对涂层做不同温度的退火处理,对比涂层硬度和结合力的变化.800 ～ 950℃温度下退火后,可以释放涂层中的残余应力,提高涂层的硬度,且不影响涂层的结合力.但1100℃退火后,涂层的硬度降低明显,且通过划痕测试可以发现,涂层完全失效.

英文摘要：

The influence of the oxygen content of the coatingproperties of composite nanostructure CrAlSiN based arc ionplating technique under pressure 3.0Pa fed different proportionsof oxygen CrAlSiON stream of nitrogen deposition coating, and thecoating do different annealing temperatures, contrast changes of coatinghardness and adhesion. At 800 ~ 950 ℃ temperature annealing, canrelease residual stress in the coating, so that the hardness of the coatingwill be increased, then the binding force of the coating are not affected.But after 1100oc annealing, the hardness of the coating is reducedsignificantly, and can be found through the scratch test, the coating hasbeen completely ineffective.