中文摘要：

采用电弧离子镀制备不同氧含量的Cr-Al-Si-O-N涂层，研究氧含量对纳米复合涂层的组织结构和力学性能的影响。结果表明：随着氧氮流量比从0增加到25%时，涂层中的氧含量从0增加到51.8%（摩尔分数），而氮含量从33.5%逐渐减少到9.8%；CrAlSiON涂层主要以面心立方结构的（Cr,Al）N固溶体形式存在，其择优取向为（111）和（200）。随着氧含量的增加，涂层的硬度呈先增加后减小的趋势；当氧氮流量比为10%时，硬度达到最大值3349 HK。由于氧化物的存在，含氧涂层在高温高速的摩擦中表现出优异的性能，具有较低的摩擦因数。

英文摘要：

Cr-Al-Si-O-N coatings with different oxygen contents were deposited by cathode arc ion plating. The effects of oxygen contents on the microstructure and mechanical properties of the nano-composite coatings were investigated. The results indicate that the oxygen content in the films increases from 0 to 51.8% （mole fraction） while the nitrogen content decreases from 33.5% to 9.8% with increasing the flow ratio of O2/（O2＋N2） from 0 to 25%. The CrAlSiON coatings are mainly comprised of FCC-（Cr,Al）N solid-solution structures, （111） and （200） preferred crystalline orientation exists in the films. With the increase of oxygen contents, the hardness shows a trend of decrease after the first increase, and the highest film hardness is 3349 HK at the flow ratio of O2/（O2＋N2） of 10%. As a result of the existence of oxide, the oxygen coatings remain lower friction coefficient, and show excellent performance at high temperature and high speed friction.