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Initial surface reactions in atomic layer deposition of HfSixOy and HfO2: A comparative study by den
  • ISSN号：0040-6090
  • 期刊名称：Thin Solid Films
  • 时间：0
  • 页码：2966-2972
  • 语言：英文
  • 相关项目：离子液体微观结构与界面性质关系的研究
作者： 胡永琪|
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离子液体微观结构与界面性质关系的研究
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