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Surface reactions in atomic layer deposition of HfO2, ZrO2 and Al2O3 on hydroxylated and sulfur-pass
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：7115-7121
  • 语言：英文
  • 相关项目：离子液体微观结构与界面性质关系的研究
作者： 胡永琪|
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