傅里叶变换光谱仪由于具有高通量、多通道、高精确度、结构紧凑以及宽光谱范围等优点,可以对气体、液体或固体样品光谱进行十分有效的分析和测量。与体积、重量庞大的大型傅里叶变换光谱仪相比,微型化、轻量化且高精度的傅里叶变换光谱仪在应用上更为便利,是实现医疗检测、化学分析、环境监测以及空间探测等前沿基础研究领域现代化发展的重要仪器设备。介绍了时间调制和空间调制两种类型的微型傅里叶变换光谱仪的结构特点和关键技术,分析了设计与制作微型傅里叶变换光谱仪过程中存在的一些关键问题与难点,并总结了该领域的研究进展和发展趋势。
Fourier transform spectrometer(FTS) is an interferential spectrometer with the characters of high accuracy,multi-channel,high flux,wide spectral range and structure compaction,which is an effective tool to measure and analyze the solid, liquid or gas sample spectrum. Recently, with the rapid growth of the demands in many areas such as chemical analysis,medicine testing, environmental monitoring and space detection, miniaturized, light-weight and high-precision FTS are strongly needed in comparison with that of the large volume and heavy weight, and it becomes an important instrument in frontier scientific research. An overview of the development of two kinds of micro FTS is presented. The key problems in designing and fabricating the FTS are discussed,and the progresses made worldwide in this field are also presented.