High-precision measurement of low reflectivity specular object based on phase measuring deflectometry
ISSN号:1003-501X
期刊名称:《光电工程》
时间:0
分类:TN206[电子电信—物理电子学]
作者机构:State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
相关基金:support by the National Nature Science Foundation of China (61421002, 61327004)