中文摘要：

通过化学气相沉积方法合成截面为六边形的单晶钨纳米晶须，利用纳米压痕仪和原子力显微镜对硅基底上的钨纳米晶须的力学性能进行表征。纳米压痕测试结果表明，钨纳米晶须的硬度为（6．2±1．7）GPa，弹性模量为（225±20）GPa。对比研究结果表明，钨纳米晶须的硬度与钨微米晶须的硬度相当，但比块体钨单晶高35％。这种硬度的增高是由于具有完好晶体结构的钨晶须在压痕测试中不会出现块体钨单晶中的位错崩。钨纳米晶须的弹性模量相当于钨微米晶须的80％，主要是由于纳米晶须的尺寸效应和测量过程中的基底效应所致。

英文摘要：

The Mechanical properties of the hexagonal tungsten nanowhiskers, which were synthesized by chemical vapor deposition, were characterized by instrumented nanoindentation and atomic force microscope （AFM）. The nanoindentation results show that tungsten nanowhiskers exhibit a hardness of （6.2±1.7） GPa and an elastic modulus of （225±20） GPa. According to the comparative test results, the tungsten nanowhiskers possess a comparable hardness to tungsten microwhiskers, and an hardness increase of 35% to the bulk single-crystal tungsten. The increase in the hardness of whiskers is attributed to the lacking of dislocation avalanche observed in the bulk single-crystal tungsten. The measured modulus is about 80% that of the tungsten microwhiskers, which can be contributed to the size effects of the nanowhiskers and the substrate effects in the nanoindentation test.