中文摘要：

为快速有效地分析晶圆制造自动化物料运输系统的性能,以获得优化的系统设计方案,提出一种基于排队网络的性能分析模型.该模型考虑多运输小车的堵塞特性,将运输小车运行过程等效为排队网络过程,并采用虚拟元对自动化物料运输系统的捷径导轨特性进行描述,提高了性能分析模型的准确性.采用某晶圆制造企业的实际生产数据进行实验,并与仿真模型进行比较.结果表明：基于排队网络的性能分析模型与仿真模型在运输小车利用率、AMHS搬运能力和空载小车到达平均时间间隔等指标方面的相对误差值97％处于[—7％,9％]的区间范围,且比仿真模型具有更高的计算效率.

英文摘要：

To rapidly and effectively analyzing performances of wafer fabrication Automated Material Handling Sys- tem （AMHS） so as to get optimized design scheme, a performance analyzing model based on queueing network was proposed. In the model, by considering the multi-vehicle blocking characteristic, multi-vehicle＇s transporting on au- tomated material handling system＇s closed-loop tracks was represented as queueinng network process, and virtual u- nits was taken to describe AMHS＇s multi-shortcut features to improve accuracy of performance analyzing model. With production data from a wafer fabrication enterprise, the proposed performance analyzing model was validated and compared with simulation model. The result showed that the 97% relative errors between the proposed model and simulation model was in range of [-7%, 9%] on the performance indexes such as vehicle＇s utilization ratio, AMHS＇s movement and interval of vehicle＇s mean arrival time. However, computing efficiency of the proposed mod- el was significantly higher than that of the simulation model.