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中文摘要：
为了提高晶圆制造Intrabay物料运输系统（简称Intrabay系统）的多目标调度性能,提出了一种基于模糊逻辑-匈牙利方法的Intrabay系统多目标实时调度方法。该方法实时响应运输小车空载和晶圆卡请求运输等动态事件,并对各事件时刻的Intrabay系统调度子问题进行多目标优化求解。采用300mm的晶圆制造系统数据进行仿真实验并与传统的Intrabay系统调度方法进行比较,结果表明该方法在Intrabay系统和晶圆加工系统的多个指标综合性能方面优于传统Intrabay系统调度方法,验证了Intrabay系统多目标实时调度方法的有效性。
英文摘要：
To obtain better muhi--objective comprehensive performances of the Intrabay material handling systems in semiconductor wafer fabrication systems（SWFSs）,a fuzzy logic and Hungarian algorithm based dispatching approach was proposed. The approach responsed the system＇s dynamic e- vents such as vehicle idling and wafer lot requiring for handling in real--time, and then solved schedu- ling sub--problems of Intrabay material handling system in the moments corresponding to these dy- namic events. With experimental data from an Intrabay material handling system of 300mm SWFSs, it is demonstrated that the proposed approach has better multi--objective comprehensive performances than both the traditional first encounter first served（FEFS） rule and the highest priority（HP） first served rule based dispatching approaches for Intrabay material handling systems.
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