中文摘要：

针对当前精密作动技术领域对精密定位系统提出越来越高的要求，设计了一种由蝶形直线超声电机驱动的二维精密定位平台系统。该定位平台系统行程为50mm×50mm，以直线型增量光栅编码器作为位置反馈元件，通过上位机编程实现运动控制卡对精密定位平台系统进行控制。为了实现直线超声电机的驱动，设计了一种新型直线超声电机驱动器，实现驱动电压和驱动频率的独立控制。在控制过程中，通过使用复合控制技术，同时结合直线超声电机具有高分辨率步进的控制特性，最终使系统达到高精度运动的控制效果。实验结果表明，在0～50mm行程内，实现了小于0．28μm的定位精度。

英文摘要：

A kind of two-dimensional （2-D） high precision positioning table system driven by butterfly-shaped linear ultrasonic motors was designed for requirements of precision positioning system in the precision actuator technology field. The range of the precision positioning system is 50mm by 50 mm, the linear incremental grating encoders were used as feedback components, and the motion control card was used for system control by control algorithm. A novel ultrasonic motor driver, which the output voltage and the frequency can be controlled independently, was designed to drive linear ultrasonic motor. The compound control and the advantages of high resolution stepper characteristics of the linear ultrasonic motor were used for high resolution control effects. Experimental results show that the positioning accuracy is able to achieve less than 0.28 μm in the range from 0 mm to 50 mm.