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Effect of Deposition Time on Microstructures and Growth Behavior of ZrC Coatings Prepared by Low Pressure Chemical Vapor Deposition with the Br2-Zr-C3H6-H2-Ar System

ISSN号：1000-2413
期刊名称：《武汉理工大学学报：材料科学英文版》
时间：0
分类：TB[一般工业技术]
作者机构：[1]Institute of Powder Metallurgy, School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing10083, China, [2]Science and Technology on Advanced Ceramic Fibers and Composites Laboratory, School of Aerospace Science andEngineering, National University of Defense Technology, Changsha 410073, China, [3]Science and Technology on Advanced Functional Composites Laboratory, Aerospace Research Institute of Materials and Processing Technology, Beijing 100076, China
相关基金：Founded by the National Natural Science Foundation of China（No.91216302）; the National Program on Key Basic Research Project of the People＇s Republic of China（No.2015CB655200）

作者： MA Xin[1,2], LI Yong[2], MEI Min[3], HU Haifeng[2], HE Xinbo[1], QU Xuanhui[1], CHEN Si'an[2]

关键词： ZRC, 超离频温度陶器, 微观结构, 生长行为, 化学蒸汽免职, ZrC ultra-high temperature ceramic microstructures growth behaviors chemical vapor deposition

中文摘要：

ZrC 涂层被低压力在石墨底层上扔有 Br 的化学蒸汽免职(LPCVD )₂-Zr-C₃ H ₆-H₂-Ar 系统。微观结构和 ZrC 涂层的生长行为上的免职时间的效果被调查。ZrC 涂层在一个岛层模式成长了。涂层的形成被 ZrC 的成核统治在起始 20 分钟，和快速的成核产生了 ZrC 的有细密纹理的结构涂层。免职时间什么时候在 30 min 上，涂层的生长被统治由晶体，给安排列的结构。精力散 X 光检查光谱学证明到锆的碳的臼齿的比率在在 ZrC 涂层，和 X 光检查的 1:1 附近显示出的光电子光谱学 ZrC 是在涂层的主要阶段，由大约 2.5mol% 伴随了 ZrO ₂ 次要的阶段。

英文摘要：

ZrC coatings were deposited on graphite substrates by low pressure chemical vapor deposition（LPCVD） with the Br2-Zr-C3H6-H2-Ar system. The effects of deposition time on the microstructures and growth behavior of ZrC coatings were investigated. ZrC coating grew in an island-layer mode. The formation of coating was dominated by the nucleation of ZrC in the initial 20 minutes, and the rapid nucleation generated a fine-grained structure of ZrC coating. When the deposition time was over 30 min, the growth of coating was dominated by that of crystals, giving a column-arranged structure. Energy dispersive X-ray spectroscopy showed that the molar ratio of carbon to zirconium was near 1：1 in ZrC coating, and X-ray photoelectron spectroscopy showed that ZrC was the main phase in coatings, accompanied by about 2.5mol% ZrO2 minor phase.

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