中文摘要：

构造强电负性等离子体中平板电极处鞘层形成的模型,使用流体动力学方程组研究等离子体鞘层.得到空间电势、空间静电荷分布和鞘层宽度作为距离函数的数值结果.结果表明,强电负性鞘层中,在等离子体区和鞘层区之间几乎没有过渡的预鞘区,在靠近极板附近鞘层里的电子、负离子和正离子的分布形成一个纯正离子鞘区.在靠近鞘边附近,空间静电荷密度分布有一个很尖的峰.发现同电正性情形相比,强电负性鞘层的宽度要窄很多,空间电势下降得快得多.

英文摘要：

A model of sheath formation on a planar electrode in strongly electronegative plasmas is presented.The plasma sheath is studied by using a set of hydrodynamic equations.Spatial potential,net space charge distributions and sheath width as functions of distance are obtained.It shows that in a strongly electronegative sheath a presheath between bulk plasma and sheath hardly exist,and electrons,negative and positive ions in the sheath form a pure positive ion sheath near boundary of electrode.Density of net space charge has a sharp peak near the sheath edge.Compared with an electropositive sheath,it is found that the width of strongly electronegative sheath is much narrower,and the spatial potential within the sheath falls much faster.