中文摘要：

高温超导氧化物YBCO外延薄膜在掺入少量锆酸钡（BaZrO3，BZO）后，其超导性能会得到较大幅度的提高。研究了不同衬底温度对掺BZO的YBCO薄膜的外延特性及超导性能的影响。以固相反应法制备了YBCO及BZO原材料，利用固相烧结工艺制备了BZO含量为2％（质量分数）的YBCO-BZO复合靶材，采用脉冲激光沉积技术（PLD）在LaAlO3（100）基片上外延生长YBCO薄膜。以不同的衬底温度制备了YBCO薄膜，用x射线衍射和高分辨透射电子显微技术对所制备的YBCO薄膜的外延特性进行了分析。最后比较了在不同衬底温度下制备的YBCO薄膜的超导性能，得到了最佳衬底温度。

英文摘要：

Superconducting properties of YBCO thin films can be greatly improved by incorporating a small a- mount of BaZrO3. In this work, the influences of the different substrate temperatures on the epitaxial growth charac- teristics and superconducting properties of YBCO thin films are investigated. The solid-state reaction method is used to synthesize YBCO and BaZrO3 （BZO） compounds, and the sintering technology is used to prepare a YBCO target containing 2wt% of BZO. YBCO thin films are grown on LaAlO3 （100） substrates by the pulsed laser deposition method at different temperatures. The epitaxial characteristics of the YBCO thin films grown at different temperatures are analyzed with X-ray diffraction and high-resolution transmission electron microscopy techniques. The supercon- ducting properties of these YBCO thin films are measured, and the optimized substrate temperatures are obtained.