中文摘要：

设计开发了与微环谐振器集成的微流体通道系统，不仅避免了敞开环境中由于液体挥发造成的微环谐振器表面盐分的聚结，屏蔽空气中的各种杂质，而且只需要30滋L反应溶液，减少了药品用量，大大节约了实验成本。同时，采用绝缘体硅（SOI)材料，利用光刻技术设计和制作了波导宽度为450nm，半径为5滋m，品质因子（Q值）为20000的光波导微环谐振器。集成的微环谐振器传感系统具有低成本、免标记、能实时监测生化反应过程等特点。以不同浓度的酒精溶液为测试对象，研究了微环谐振器对均质溶液的传感性能，传感芯片对溶液折射率的探测灵敏度为76.09nm/RIU，探测极限为5.25x10^*RIU，验证了此微环谐振器对均质溶液进行浓度检测的可行性。利用此传感系统对人免疫球蛋白IgG进行了非标记免疫检测。在测试中，采用微流体通道系统将相应抗体修饰到微环谐振器表面，利用光谱仪对修饰过程以及抗原抗体特异性结合过程中的共振谱线漂移情况进行了监测。结果表明，光波导微环谐振器可以对生物分子进行实时监测。

英文摘要：

The m icrofluidic channels integrated with m icroring resonator were designed.The salt coalescenceon chip surface caused by liquid volatilization in open environm ent was avoided and only30滋L of reactionsolution was consum ed.These channels significantly reduced the experim ent cost.The design,fabrication andcharacterization of a highly sensitive and label-free silicon-on-insulator(S O I)m icroring optical resonatorintegrated with the m icrofluidic channels were dem onstrated.The radius of the m icroring was5滋m and thestraight waveguide with a width of450nm was em ployed in the m icroring resonator.The m icroring resonatordevice had m any advantages such as high sensitivity,label-free and real-tim e detection.Using differentconcentrations of ethanol solution with known refractive in d ices,the refractive index detection sensitivity was76.09nm/R IU and the volume refractive index detection lim it was5.25x10-RIU.W e also dem onstrated thelabel-free quantitative specific detections of hum an im m unoglobulin G(Ig G)solutions using an antibodymodifiedm icroring resonator by m easuring the resonance wavelength shift resulting from refraction indexchanges causing by the im m obilization of antibodies and specific recognition betw een antibodies and antigens,respectively.The results showed that the m icroring optical resonator could real-tim e monitor the reactionbetw een biological m olecules,the resonator could be used in the quantitative detection and biological sensing.