中文摘要：

研制了一套基于光杠杆原理的微悬臂梁阵列传感器平台,并通过使用设计制作的微悬臂梁阵列芯片展示其在生物化学方面的检测应用。传感器平台使用光导纤维束分别与激光器耦合作为悬臂梁阵列的扫描光源,具有良好的检测稳定性,检测信号噪声水平约为2 nm;设计制作的微悬臂梁阵列芯片具有良好的平直度,温度响应均匀一致,各梁温度改变响应灵敏度偏差不超过5.0%。将整套传感系统被用于检测水溶液中的Hg^2＋,检测浓度范围为1-200 ng/m L;同一浓度下微悬臂梁阵列检测结果曲线一致性良好,平均偏差小于15%。在研制仪器平台上,分别实现了自制和国外商品化芯片对1.0和0.2 ng/m L样品的检测,结果表明,制作的微悬臂梁阵列芯片的检测灵敏度相对较低,需进一步改进悬臂梁阵列制作工艺。

英文摘要：

A cantilever array sensor platform has been developed based on the optical lever method,the cantilever array chip is also fabricated to introduce its applications on biochemical detection.Optical fibers coupled to lasers are used as the scanning light source.This sensor system has good stability,and the noise of the detection signal is about 2 nm.Meanwhile,the cantilevers of the fabricated chip have good straightness and are consistent to temperature response,and the deviations of response sensitivity of cantilevers caused by temperature change are no more than 5.0%.This sensing system is used to detect Hg^2＋in aqueous solution with a concentration range of 1-200 ng/m L.The deflections of one array chip are close in the same concentration,and the average deviation is less than 15%.Samples at the concentration levels of 1 ng/m L and 0.2 ng/m L are detected separately by the fabricated chip and a foreign commercial chip on the sensor platform.The result shows that it＇s difficult for the fabricated chip to achieve a higher detection sensitivity and necessary to improve the cantilever array production process.