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液相基底上铝薄膜的开裂与折叠行为研究
  • ISSN号：1672-7126
  • 期刊名称：《真空科学与技术学报》
  • 时间：0
  • 分类：O484.2[理学—固体物理;理学—物理]
  • 作者机构：[1]中国计量学院物理系,杭州310018, [2]浙江大学物理系,杭州310027
  • 相关基金：国家自然科学基金（No.10874159 11074227）; 浙江省自然科学基金（No.Y6090542）资助课题
作者： 余森江[1,2], 周曼[1], 江维顺[1], 洪阳[1], 陈苗根[1,2]
关键词： 液相基底, 铝薄膜, 开裂, 折叠, 内应力, Liquid substrate, Aluminum film, Crack, Overlap, Internal stress
中文摘要：

利用真空蒸发方法在液相基底（硅油）上成功制备出具有自由支撑边界和界面条件的金属铝薄膜系统,研究了薄膜的开裂和折叠行为。结果表明：沉积过程中,硅油基底的受热膨胀使铝薄膜处于较大张应力状态,伴随着张应力的释放,薄膜中出现开裂形貌。沉积完成之后,系统的逐渐冷却促使硅油基底收缩,并使得铝薄膜处于较大压应力状态,伴随着压应力的释放,薄膜中出现特征的折叠形貌。基于液相基底上金属薄膜的特殊力学行为,对此类开裂和折叠形貌进行了深入阐述。

英文摘要：

Here,we addressed the cracking and folding of the aluminum films deposited by vacuum evaporation on liquid substrates（silicone oil）.The impacts of the growth conditions on microstructures of the Al films were studied with an optical microscope.The results show that the interfacial stress,originated from the mismatch of the thermal expansion coefficients between the Al films and the surface of silicone oil accounts for the cracks and the overlaps.For instance,in Al deposition,the tensile stress of Al,exerted by thermal expansion of silicone oil,generated cracks;whereas in cooling of the Al films,high compressive stress,imparted by the surface contraction of silicone oil,resulted in folding of Al films.

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期刊信息
  • 《真空科学与技术学报》
  • 中国科技核心期刊
  • 主管单位:中国科学技术协会
  • 主办单位:中国真空学会
  • 主编：李德杰
  • 地址：北京朝阳区建国路93号万达广场9号楼614室
  • 邮编：100022
  • 邮箱：cvs@chinesevacuum.com
  • 电话：010-58206280
  • 国际标准刊号：ISSN：1672-7126
  • 国内统一刊号：ISSN：11-5177/TB
  • 邮发代号:
  • 获奖情况:
  • 国内外数据库收录:
  • 美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）,英国英国皇家化学学会文摘,中国北大核心期刊（2000版）
  • 被引量:4421