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楔形铁薄膜的制备及内应力释放模式研究
  • ISSN号：1002-185X
  • 期刊名称：《稀有金属材料与工程》
  • 时间：0
  • 分类：TG146.4[金属学及工艺—金属材料;一般工业技术—材料科学与工程;金属学及工艺—金属学]
  • 作者机构：[1]中国计量学院, [2]浙江大学, [3]台州学院
  • 相关基金：国家自然科学基金(10874159,11074227);浙江省自然科学基金(Y7080042,Y6090542,R6110362)
作者： 周红[1], 余森江[1,2], 张永炬[3], 蔡萍根[2]
关键词： 楔形薄膜, 电话线褶皱, 应力释放, 力学性能, wedge-shaped film, telephone cord buckle, stress relief, mechanical property
中文摘要：

利用硅油的流动特性在玻璃基底表面成功制备出膜厚呈连续变化的楔形铁薄膜系统,研究薄膜的内应力释放模式。实验表明:在薄膜的沉积过程中,硅油对铁原子及原子团簇的快速淬火作用使得薄膜中包含了丰富的空洞和缺陷,并产生较大的残余压应力;沉积完成之后,残余压应力的释放促使薄膜与基底脱离而形成电话线结构的褶皱形貌。褶皱的波长λ和振幅A均随着薄膜厚度的增加而增加。原子力显微镜的剖面图显示,褶皱的宽度l和最大隆起高度δ分别在10和1μm的数量级。基于薄板弯曲理论,对电话线褶皱的规则外形、网络模式和分叉形貌等进行了理论分析。

英文摘要：

利用硅油的流动特性在玻璃基底表面成功制备出膜厚呈连续变化的楔形铁薄膜系统,研究薄膜的内应力释放模式。实验表明:在薄膜的沉积过程中,硅油对铁原子及原子团簇的快速淬火作用使得薄膜中包含了丰富的空洞和缺陷,并产生较大的残余压应力;沉积完成之后,残余压应力的释放促使薄膜与基底脱离而形成电话线结构的褶皱形貌。褶皱的波长λ和振幅A均随着薄膜厚度的增加而增加。原子力显微镜的剖面图显示,褶皱的宽度l和最大隆起高度δ分别在10和1μm的数量级。基于薄板弯曲理论,对电话线褶皱的规则外形、网络模式和分叉形貌等进行了理论分析。

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期刊信息
  • 《稀有金属材料与工程》
  • 中国科技核心期刊
  • 主管单位:中国科学技术协会
  • 主办单位:中国有色金属学会 中国材料研究学会 西北有色金属研究院
  • 主编：张平祥
  • 地址：西安市51号信箱
  • 邮编：710016
  • 邮箱：RMME@c-nin.com
  • 电话：029-86231117
  • 国际标准刊号：ISSN：1002-185X
  • 国内统一刊号：ISSN：61-1154/TG
  • 邮发代号:52-172
  • 获奖情况:
  • 首届国家期刊奖,中国优秀期刊一等奖,中国有色金属工业优秀期刊1等奖
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国科学引文索引（扩展库）,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）,中国北大核心期刊（2000版）
  • 被引量:24715