中文摘要：

要将纳米结构作为功能元件应用在微纳传感器、纳米电路等系统中,首先要解决材料的定位操作问题。在自行设计的几种电极的基础上,采用介电泳技术对SiO2微纳米材料进行操控,可以实现材料的沿电场方向的排布和电极间的跨接,为解决纳米结构的定位操作做了有益的尝试。初步测试了采用介电泳技术操控自行生长的ZnO纳米结构制作而成的湿度传感器的基本特性并取得很好的响应,表明介电泳技术可以很好得实现纳米材料在传感器领域中的应用。

英文摘要：

One of the key problems of nano-structured materials for electronic device applications in micro-/ nano-sensors and circuits is to align and manipulate them to the preset locations. With several home-made electrode pairs, we succeeded in manipulating the SiO2 micro-/nano-particles along the electric field and de- posited them across the gaps between two electrodes. It is proven a helpful experiment to precisely assem- ble of the nano-structures. A relative humidity sensor, using the dielectrophoretically located self-grown ZnO nano-materials as sensing elements, had been fabricated and the sensing properties had been tested. It confirms the dielectrophoresis can fulfill the application of nano-materials in the field of sensors.