通过预加热处理完成了氧化锌(ZnO)种子层的制备,在种子层退火之后利用水浴法生长制备了排列有序的ZnO纳米棒阵列.采用扫描电子显微镜(SEM)、X射线衍射(XRD)和光致发光光谱(PL)分析了ZnO纳米棒阵列的表面形貌、结构和光学性质,考察了预处理温度和水洗时间对产物性能的影响.结果表明:预处理温度较低时无法形成ZnO种子层;制备的ZnO纳米棒阵列是纤锌矿结构;随着水浴时间的延长,ZnO纳米棒的长度逐渐增加.
ZnO nanorod arrays are grown on silicon by chemical bath deposition.The seed layer is prepared by pre-heated,and then followed with chemical bath deposition.The morphology,structure and optical properties are characterized by SEM,XRD and PL.The results indicate that the prepared ZnO nanorod arrays are wurtzite structure,and the length of the ZnO nanorods increases with the length of the water bath time.