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Repairing oxygen plasma-damaged on low dielectric constant MSQ (methylsilsesquioxane) films with ann
  • ISSN号：1385-3449
  • 期刊名称：Journal of Electroceramics
  • 时间：2012.2
  • 页码：70-73
  • 相关项目：双频驱动常压冷等离子体射流的光谱特性研究
作者： Yin, Guiqin|Yuan, Qianghua|Ning, Zhaoyuan|
同期刊论文项目
双频驱动常压冷等离子体射流的光谱特性研究
期刊论文 9
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