为揭示激光诱导金属表面周期结构的阈值现象及规律的物理本质,实验研究了飞秒脉冲激光在不同实验参数条件下烧蚀铜、铝、银3种金属靶材表面产生的形貌变化,提出激光能量累积效应机制来定量解释激光诱导表面周期结构(LIPSSs)存在单脉冲能量密度阈值与脉冲数阈值的原因及其变化规律。基于激光脉冲能量时空上高斯分布假设和能量累积效应,定量讨论了飞秒激光动态扫描速度和激光脉冲能量密度对产生的表面周期性结构质量的影响,理论和实验结果符合较好。
In order to investigate threshold phenomena of laser induced periodic surface structures(LIPSSs),experimental study was carried out of energy density threshold and pulse number threshold of laser induced periodic surface structures on bulk copper,aluminum,and silver samples under different experimental parameters.The laser energy accumulation effect was then explored to explain the evolutions and threshold phenomena of laser-induced surface periodic structures.In addition,based on the laser energy accumulation and the assumption of Gaussian energy distribution of pulsed laser,scanning velocity,distance of two adjacent scan lines and pulsed laser energy density were optimized in order to fabricate high-uniform and large-area period surface structures,which were in good agreement with present experimental results.